실리콘 소재 자율주행차 장애물 감지 센서 개발…비용 절감
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연세대·DGIST 연구팀 "값비싼 화합물 반도체 센서 대체"

[안종현 교수 제공. 재판매 및 DB 금지]
(대전=연합뉴스) 박주영 기자 = 한국연구재단은 연세대 안종현 교수와 대구경북과학기술원(DGIST) 이재동 교수 공동 연구팀이 자율주행 자동차용 '라이다'(Lidar) 센서를 저렴한 실리콘 소재로 제작하는 데 성공했다고 30일 밝혔다.
라이다는 레이저를 이용해 주변 장애물을 인지하고 측정하는 센서이다. 자율주행 자동차의 '눈'이라 불리는 핵심 기술이다.
단파 적외선을 감지할 수 있는 인듐갈륨비소(InGaAs) 화합물을 활용한 반도체가 라이다 센서 소재로 활발히 연구되고 있지만, 제작 비용이 높다는 한계가 있다.
실리콘 반도체는 단파 적외선을 감지하기 어려워 지금까지 라이다 센서 소재로 적용되지 못했다.
연구팀은 두께 10㎚(나노미터·1㎚는 100만분의 1㎜) 이하의 초박막 실리콘을 만든 뒤 실리콘의 전자 구조를 변화시켜 단파 적외선을 감지할 수 있는 광센서를 개발했다.
연구팀은 딱딱해 깨지기 쉬운 실리콘 웨이퍼를 초박막 상태로 만들어 높은 압력에도 부서지지 않도록 해 전자 구조를 변형시키는 데 성공했다.
안종현 교수는 "세계 최초로 단파 적외선을 감지할 수 있는 실리콘 광센서를 개발했다"며 "자율주행 자동차 대중화에 기여할 것"이라고 말했다.
이번 연구 성과는 국제 학술지 '사이언스 어드밴시스'(Science Advances) 이날 자에 실렸다.
jyoung@yna.co.kr
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